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Siargo Ltd. - Mass Flow Sensors for Medical Applications

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The FS-series MEMS mass flow sensors are specially designed for medical applications. The high sensors are also available upon requests.

  • FS1000 Series are best to be used for ventilators/anesthesia equipments. The sensors can measure up to 250SLPM. The low flow is down to 0.05SLPM capable ISO-15mm connectors.
    • FS1015CL - ISO-15mm M/F connector, provide either analog and/or digital output with a flow rate up to 180 SLPM.
    • FS1022UN/CL - ISO-22mm conical connector, provide either analog and/or digital output with a flow rate up to 250 SLPM.
  • FS2000 Series are best to be used for ventilators/anesthesia equipments. The automatically switched between 0 ~+/-20SLPM and 0~+/-120SLPM. The sensors can be used for neonatal as well as high-end adult ventilators.
    • FS2015UL - ISO-15mm conical connector. Best for neonatal applications with excellent linear output.
    • FS2015YN - ISO-15mm conical connector. Best for adult applications.
    • FS2015UND - with automatic flow range switch. Best for high-end ventilators
  • FS3000 Series are specially designed for spirometers and autosiprometers. The sensors measure flow up to 1200 SLPM. The sensors feature fast response time that outperforms most of the current offers.
  • FS4000 Series are specially designed for electronic flow meters for anesthesia equipments and oxygen concentrators.
    • FS4003 - can be used for oxygen concentrators, personal oxygen meters
    • FS4008 - apply for electronic flow meters for anesthesia equipment


  • FS5000 Series are specially designed for dosing control, oxygen tracer, gas mixer and other relevant applications.

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