Product Announcement from Freudenberg-NOK Sealing Technologies


Simriz® 508 for Semiconductor Applications-Image

Simriz 508 is designed for demanding high temperature static or dynamic sealing applications in many dry chemical environments. Simriz 508 is suited for many oxidizing plasma chemistries. Simriz 508 also exhibits outstanding chemical resistance.

Features and Benefits

  • High temperatures capabilities
  • Excellent plasma resistance
  • Minimum particulation
  • High physical properties
  • Wide chemical resistance
  • Cost-effective


Recommended Dry Processes

  • Deposition: LPCVD, CVD, APCVD, HDPCVD,PECVD, RPCVD, SACVD
  • Plasma etch: oxide and metal
  • Ashing
  • Metalization: PVD, evaporation, sputtering
  • Ion Implant
  • RTP
  • Oxidation
  • Diffusion
  • Lamp Anneal

Equipment Locations

  • Chamber Lid Seals
  • Bell Jar Seals
  • Endpoint Windows
  • Gas Inlet Seals
  • Isolator Valve Seals
  • KF Fittings
  • Slit Valve Seals
  • Valve Seals
  • Window Seals


Typical Physical Properties

Color: White
Hardness, Shore A: 75
Tensile Strength, psi (MPa): 2277 (15.7)
Elongation: 246%
Modulus at 100% Elongation, psi (MPa): 711 (4.9)
Compression Set: 70 hrs. at 275°C 18%
Service Temperature Range, °C (°F): -6 to 300 (21 to 570)

 
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