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Formulated with proprietary technology, Simriz 499 offers excellent resistance to solvents and acids
Simrit is expanding its Simriz® brand of perfluoroelastomer compounds with the introduction of the newly formulated Simriz 499 material. The latest in the Simriz line of proprietary materials, Simriz 499 was specifically developed to combine plasma resistance, broad chemical resistance and ultra-low trace metals with reduced adhesion to aluminum and other metal surfaces, for use in valves and doors.
"We are excited to debut Simriz 499, our latest Simriz material innovation for the semiconductor industry," said Vinay Nilkanth, vice president, business development, Simrit. "Simriz 499 is a testament to Simrit's commitment of continually striving to offer our customers the best, most evolved materials and technologies that meet their specific needs."
The 75 durometer clear perfluoroelastomer material has a service temperature range of -6 to 280 degrees Celsius (21 to 236 degrees Fahrenheit) and offers excellent plasma resistance, very low particle release, wide chemical resistance and very low adhesion to aluminum. Simriz 499 is recommended for a variety of wet and dry processes, including decomposition – LPCVD, CVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD; plasma etch for both oxide and metal; ashing; metallization – PVD, evaporation and sputtering; ion implant; TRP; oxidation; diffusion; lamp anneal; water preparation, cleaning and rinsing; etching; stripping; and copper plating.
The compound's low adhesion to mating metal substrates makes it an ideal solution for numerous applications, including: vacuum fittings and vessels; bell jar, valve, drain, window, slit valve, isolator valve, chamber lid, door and lid seals; flow meters; connectors; endpoint windows; KF fittings; fittings; filters; pumps; and chemical containers.
Simriz is Simrit's proprietary family of perfluoroelastomer compounds that offer premier sealing performance. Simrit is the single-source developer of Simriz, starting with the base polymer to ensure complete oversight and continuity in the compounding process and eliminating any need for costly outsourcing.
For more information, visit the Simrit Web site at www.simrit.com.
