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Glow-Discharge Mass Spectrometry (GDMS):

Most suited for determining the metallic impurities

GDMS is a sensitive and flexible analysis for a wide variety of sample forms. The analysis is designed for determining bulk element compositions as well as for collecting depth profiling information with very high sensitivity. This technique effectively destroys the sample and is thus a true bulk analysis of the material. Because of the sensitivity it is really only suitable for looking at contaminants and trace elements.

Relevant Items for GDMS Analysis:

• Sputtering Targets
• Metals including refractory metals and alloys
• High purity materials
• Rare earth metals and their oxides
• Precious Metals

Advantages:

• Depth profiling of coatings and oxide layers
• Covers full periodic table excluding Hydrogen
• Sub-ppb detection

Disadvantages:

• It cannot detect H, C, N, O₂