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Universal Semiconductor, Inc. - MEMs Gas Sensor
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MEMS GAS SENSOR
The USI thermal conductivity gas sensor incorporates advanced design innovations in MEMS (Micro-Electrical-Mechanical-Systems), and was developed and manufactured in Silicon Valley
FEATURES
- Sensitivity range: 1 – 100% by volume
- Leak detection sensitivity in cc/sec 2x10-5 for He, 1x10-4 for CH4, 1x10-4 R12 (dichlorodifluoromethane), and 2x10-4 for Ar.
- Longer term operational stability
- Physical contact gas concentration measurement
- Micro power consumption
- Miniaturized package form factor
- Mass market low cost custom packaging
TYPICAL APPLICATIONS
- Natural gas quality control
- Combustion control
- Natural gas engine control
- Industrial process control
Click here for more information, such as Relative gas thermal conductivity versus temperature chart, comparison of catalytic sensor and advanced thermal conductivity sensor and more.
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