Series 010 Mini UHV Gate Valve
Product Announcement from VAT, Inc.
The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.
Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants.
Nominal inside diameters (ID): 25 (1") - 50 (2")
Body material: Stainless steel
Actuator types: Manual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single acting with closing spring NC)
Sealing technology: MONOVAT-System
Sealing materials: Bonnet: Metal / Gate: FKM (VITON®)
Cycles until first service: 50'000 cycles
Leak rate: Body: < 5 . 10-10 mbar ls-1 ; Valve seat: < 1 . 10-9 mbar ls-1