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The Dektak^® 8 Advanced Development Profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films. The system provides 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm. Its overhead gantry design enables scan lengths to 200mm, for planarity and flatness measurements.

Dektak's exclusive N•Lite™ low force sensor option offers stylus forces down to 0.03mg, for scratch-free measurement of soft materials. N-Lite also enables the use of super-sharp styli which can characterize sub-micron lines and spaces, while high aspect ratio tips access deep trenches, measure Shallow Trench Isolation (STI) etch depth, and probe deep structures for MEMS research.