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The ATF4 sensor provides an auto focusing servo system with fast feed back signals needed to accurately focus almost every type of infinity corrected microscopes. It projects a reference laser spot through the microscopes own objective lens. The sensor determines direction and measures the distance towards the best focus position.

ATF4 is predominantly used in scanning applications such as:

• Color Filter inspection/ repair
• Photo-Mask inspection/ repair
• Laser micro-machining
• TFT glass inspection

ATF4 Special Features:

• High speed measurement rate, supporting fast tracking applications
• Adaptive laser intensity control (1 to 99% reflectivity)
• Covers microscope objectives from 2x to 100x, including UV, NUV, and NIR
• Supports static and tracking auto focus applications
• Provides features to eliminate the reference laser dot from the camera image

Available in 2 Versions:

• ATF4 SA - Stand alone auto focus sensor with AO
• ATF4 SYS - Autonomous autofocus servo system with controller

The SYS version can be integrated with either an MCM controller for driving z-stages powered by any type of stepper motor (user provides drive) or MCZ which is a fully integrated controller and drive, which operates 2 phase stepper motors.

Download:

• Brochure
• ATF4 Dimensions
• MCM Dimensions
• Integration Diagrams for MCM & MCZ

Please click on the links above for more information or request a quote today!