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ATF6 Laser Auto Focus and Tracking Sensor for the SemiCon Industry

The WDI Laser Auto-focus ATF-6 sensor is an active optical device.

The ATF-6 is the newest member of the WDI family of ATF auto-focus and proximity sensors. It has the same footprint, is "pin to pin" compatible with the ATF-4 and ATF-5 sensors and uses the same MCM controller and NewWegu software for setup and testing.

The ATF-6 projects a line segment onto the specimen. This generates a vast redundancy of focusing information as compared to laser dots and thus assures accurate focusing on patterned wafers, photo-masks and even diffusing surfaces. The ATF-6 continuously measures the distance and direction towards the best focus position and thus is effective regardless whether the microscope is still or in motion. The dynamic focusing on the moving target it referred to as "Tracking Auto-Focus".

Typical applications

• Patterned wafer inspection
• Wafer processing
• Photo-mask inspection and repair
• Laser micro-machining

Special Applications

• The ATF6 is available in the Cell/Module version, which is capable of selectively focusing on the TFT layer neglecting the top surface of the glass. This unique feature facilities inspection and repair of flat panel displays at the cell or module stage.
• For 3D periodical structures, such as MEMs or touch screens, user may select whether to keep focus on the substrate or tops of the bumps.
• ATF6 may be configured for scanning 3D metrology.

Available in 3 Versions

ATF6 SA

Stand alone Sensor (MCM not included)

ATF6 SYS

Autonomous autofocus system, includes MCM

ATF6 CM

Autonomous autofocus system for Cell/Module repair, includes MCM

Profilometer

Scanning for 3D topography including thin films

ATF6 SPECIAL FEATURES

The Sensor operates on almost all types of surfaces:

• Reflective and diffusing
• Low reflectivity surfaces (down to 1%)
• Transparent and opaque
• Plain, patterned and textured
• Optional functions:
• Critical dimension measurement
• AOI automated optical inspection
• ATF6 covers microscope objectives ranges from 2x to 100x
• Parafocal offset correction function

Laser Auto-Focus & Focus Tracking System

• ATF Family of Sensors boast the smallest footprint of all the available on the market auto-focus solutions
• The sensors are easy to integrate and setup
• The setup needs to be performed only once; there is no need for the setup adjustments with the changing targets
• For setup and calibration the sensor communicates with the host over RS232 link
• The setup, calibration and diagnostics software application is provided

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