Condensation of many critical gases occurs due to a phase shift at low temperatures. Burning of the gases will occur if the delivery line is too hot. High or low temperature condition may result in undesirable particulates and cause costly device defects and tool maintenance.

Watlow's new Stretch-To-Length™ (S-T-L) gas line heater system was developed as an easy to assemble temperature solution with performance superior to heat tape. S-T-L's preformed construction gives engineers the ability to wrap around the delivery line with consistent heater/gas line contact for improved temperature uniformity. S-T-L's flexibility gives engineers the ability to compensate for the size of different components thus reducing the potential for hot and cold spots.

The S-T-L system includes a two watts per square inch S-T-L heater and silicone rubber foam insulation. Watlow's Control Consoles with process and redundant high limit protection are recommended for optimum system performance and to meet SEMI S2-93 guidelines.

Features and Benefits:

Easy to install two part system • Conveniently fits on most gas line configurations

Flexible heater design gives engineers the flexibility to easily customize the thermal profile for each gas line application • Standard designs and stocked product allow quick prototyping to determine energy distribution requirements for process improvements

Flexible standard system components • Eliminate unnecessary lead times for custom designs

Specifications • Heater and insulation jacket material reinforced silicone rubber fabric • Color: • Insulation and outer jacket – orange • Heater – orange • Clean room strap fasteners • Voltage: 120 and 240V~(ac) • Maximum operating temperature: 200°C • Heater watt density: 0.31 W/cm2 (2 W/in2) – Watlow recommends 80 percent line wrap for optimum performance • Power lead wires: 305 mm (12 in.); #16 AWG UL® 1180 CSA, rated 13A, lead wire pair encapsulated in reinforced silicone rubber sleeving • Heater interconnectable up to a 13A circuit • Material rated UL® 94-HB • Heater materials are UL® rated to 200°C

Applications: • Gas delivery lines • Boron trichloride, BCI 3 • Chlorine trifluoride, CIF 3 • Dichlorosilane, (DCS), SiH 2 CI 2 • Tetra ethyl orthosilicate, TEOS • Tungsten hexafluoride, WF 3 • Process gas line qualification

Agency Certification, Recognition Compliance and Approvals Contact factory for specific application and approvals. • SEMI S2-93 compatible with a Hi Limit T/C and controller • UL® recognized for U.S. safety standards