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iCon has developed a semi-automated valve manifold box (VMB) for semiconductor UHP specialty gas delivery. This VMB is designed to provide a safe, high purity, and economical means of supplying up to eight points of use from a single hazardous gas supply line. Its automated functions safely distribute, shut off, evacuate, and purge distribution branches individually or collectively, depending on operating and alarm conditions. It is specifically configured to enable the activation or deactivation of any branch without affecting the status of any other branch in the VMB. All valves, and associated components are housed within an exhausted enclosure, and they are locally controlled by a microprocessor-based control system.

The iCon 8X VMB is a modular design which allows for easy installation and start-up up, as well as for flexible configuration without excess hardware expense. Manifolds within the VMB house up to four or eight branches depending on the number of branch assemblies required. The VMB can be populated with any number of branch assemblies up to eight total. The control pneumatics will support only the number of branches specified at time of order, unless otherwise specified. Therefore, additional control pneumatics will be required when adding branch assemblies at a later date. The upgrade is a simple, modular procedure.

The enclosure is configured as follows:

• 24" x 30" enclosure with separate electronics enclosure mounted on top.
• One 3/8" X 5/8" coaxial bulkhead hazardous gas inlet connection on top.
• One 1/4" x 1/4" bulkhead purge gas inlet connection located on bottom.
• One 1/4" x 1/4 bulkhead drive gas inlet connection located on bottom.
• Up to Eight 1/4" x 1/2" bulkhead hazardous gas outlets located on top.
• One 1/2" bulkhead hazardous gas vent outlet located on top.
• One 4" exhaust duct located on top.
• Four mounting tabs, two on top and two on bottom for easy installation onto unistrut.

The plumbing system is configured with the following:

• Manual high pressure supply isolation valve - Connects to source supply manifold.
• Pneumatic high pressure supply isolation valve.
• Spool piece insert for optional low pressure secondary regulator.
• Spool Piece for optional branch pressure indicating gauge.
• Redundant vent/purge isolation valves - Connects to common vent/purge manifold.
• Spool piece insert for optional Millipore XL series mini inline filter/purifier.
• Manual high pressure outlet isolation valve.
• Vent/Purge Supply isolation and exhaust manifold with inline Purge gas filter and Dual 30-0-150 set-point gauge.
• VMB design to accept Millipore WaferPure Mini XL Integrated Filter/Purifier e.g. (WPMV 200 SS) Allows a maximum of 5 liters per minute per branch.
• Mott POU-05-SV1 Mini In-line Filter on Purge Gas Supply.