Advanced vaporization technology enables purer and more efficient vapor production.
Many industrial and semiconductor processes need to convert liquids including both water and other liquid precursors into highly controlled and pure vapors. Brooks Instrument offers a range of vapor delivery and direct liquid injection vaporization technologies to satisfy key process requirements s... Read more...More Product Announcements from Brooks Instrument
The DLIFS Vaporizer gently vaporizes your critical precursors without buildup of non-volatile contaminants.
Watch as Ed Fisher of Brooks Instrument describes a massive Brooks DLI Vaporizer system for delivering MTS vapor. Read more...More Product Announcements from Brooks Instrument
Designed to enable the user to perform their own maintenance and cleaning, the direct liquid inject flange (DLIFS) vaporizer from Brooks Instrument provides indirect vaporization-on-demand for most liquid precursors. Read more...More Product Announcements from Brooks Instrument
Bronkhorst High-Tech BV, manufacturer of mass flow meters and controllers for gases and liquids, designed a new series of Vapor Delivery Modules. These compact sub-systems incorporate a (thermal or Coriolis) liquid flow controller, one or two mass flow controllers for carrier gas and a temperature controlled mixing and evaporation device. The modules are equipped with an 1.8” TFT d... Read more...More Product Announcements from Bronkhorst USA
The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapour generation system consists of a liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. Read more...More Product Announcements from Bronkhorst USA