Temptronic ThermoChucks are conductive heating and cooling systems for wafer testing at temperature. Its primarily use is for wafer testing in Probe Stations, as well as Laser Trim and Wafer Burn-in. A few specialized applications include Low leakage probing (fA level), and High voltage probing (up to 10kV).
- -65C to +300°C
- 150mm, 200mm & 300mm<.../li>