MicroSense, LLC

The MicroSense Polar Kerr System is a full 300 mm wafer, non-contact magnetic metrology tool for perpendicular and in-plane MRAM, providing critical process control information on the multi-layer magnetic stack that is an essential component of MRAM fabrication. This metrology tool offers unsurpassed magnetic field control, and is capable of measuring wafers up to 300 mm. Read more...

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MTI Instruments Inc.

An alternative to fully automaed metrology tool, the Proforma 300SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 150mm, 200 mm and 300mm wafers, the 300SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Read more...

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MTI Instruments Inc.

Proforma 200SA - Semi-automated, full wafer surface scanning for thickness, TTV, bow, warp, site and global flatness measurements. The Proforma 200SA can be used for most wafer materials and accommodates diameters from 75 to 200 mm. Read more...

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View Wafer and Thin Film Instrumentation datasheets.