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  • Ionizing Wet Scrubber (IWS) Removes Both Acid Gas and Submicron Particulate (.pdf)
    has three major incinerators that all use ionizing wet scrubbers to remove acid gases and fine particulate that can include various heavy metals such as antimony, lead, and zinc.
  • Measurement of Oxidant and Acid Gases in Wet Gas Streams
    Increasingly stringent air quality standards have led to expanding use of wet scrubber systems to control atmospheric emissions. The main requirement of a monitoring system in this application is to detect breakthrough of gases due to scrubber failure. Unfortunately, monitoring reactive gas
  • MICRO:Top 40 Product Allstars (Nov/Dec '98)
    . The system can be incorporated into polishing systems made by OEMs such as Applied Materials, Ebara, IPEC/Planar, Speedfam, and Strasbaugh. The Point Source scrubber removes virtually all inorganic contaminants at an efficiency rate of 99.5%. The system can be used for hydrochloric acid, hydrogen
  • Evaluating chemical mechanical cleaning technology for post-CMP applications
    effective cleaning chemicals and improved mechanical action on the double-sided scrubber. To properly differentiate between the standard DSS process and recent enhancements in cleaning capabilities, the new technology has been named chemical mechanical cleaning (CMC). CMC technology allows hydrofluoric acid

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