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  • MICRO: Tool/Fab Automation
    electrostatic discharge (ESD) events. Such discharges can cause microprocessors in process tools to operate unpredictably. Erratic tool behavior, in turn, can result in tool lockups, failed calibrations, and error messages, all of which lead to tool downtime and the need for operator intervention
  • MICRO: Product Technology News (May '2000)
    by applying airflow and temperature control within the machine chamber and through the use of a hybrid active damper. The tool's improved vibration isolation structure allows synchronization control at a high scanning speed. A series of in-process monitors detects and measures ESD events accurately
  • MICRO:Archive:Back Issue TOC
    and MEMS Technologies, Semicon Southwest, and more DI/Veeco joins nano institute; PRI announces layoffs; ESD group awards grants; Revised deposition book out Improving the etch process as part of an overall plan to increase fab productivity Testing liquid-handling system components to ensure purity
  • Medical Device Link .
    with aluminium oxide, silicon carbide, or other powders can result in a static load of 5000 V, giving rise to ESD events that can destroy sensitive devices such as resistors, PCBs, and pacemakers. The (Ridderkerk, Netherlands) has developed a workstation that prevents these electrostatic charges
  • Developing an exit charge specification for semiconductor production equipment
    of insulating materials that easily store static charge for a long time. Product motion presents many opportunities for contact with grounded surfaces. In the presence of static charge, such contacts inevitably result in electrostatic discharge (ESD) events that may damage the product directly. Even
  • Medical Device Link .
    Medical Device & Diagnostic Industry Polymer materials compounded with a variety of additives provide design flexibility in protecting against static accumulation, ESD, and EMI/RFI. The rapid growth of thermoplastics in medical markets is a testament to the suitability of these materials to meet
  • MICRO: Expansions and Acquisitions
    . The company is based in Bowie, TX. The purchase makes Cornerstone a subsidiary of Ion and enables the parent company to expand its line of ESD-management products to cover flooring. Founded in
  • MICRO:March 1998:Product Technology News (p.122)
    the risk of repetitive injury. The tool moves wafers from a process cassette into a "coin stack " shipping container or from a shipping container into a process cassette. The orientation mark is found before the wafer is transported into the shipping container or placed into the cassette. An ESD

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