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  • Effect of Pulsing Parameters on the P-CFUBMS of Chromium Aluminum Nitride Coatings (.pdf)
    Controlled ion bombardment of growing thin films can be used to modify and improve the film structure and properties. Recently, higher energetic species (up to hundreds eV) were found in the plasma by pulsing the target(s) in magnetron sputtering. In this study, an electrostatic quadrupole plasma
  • Boron Nitride
    Boron nitride (BN) is based on compounds of boron and nitrogen. It is relatively inert and has good thermal conductivity combined with good electrical insulation, making this material useful in fabricating substrates and insulators in microelectronics applications. Boron nitride is polymorphic
  • Laser Scribing Thin Silicon Nitride Films
    Silicon dioxide and titanium dioxide have been used as AR coatings in solar cells but SiO has a low refractive index whereas TiO does not contribute to surface passivation. Silicon nitride is an important exception to the general rule that carbide and silicide films are usually electrically
  • Tough Coatings
    they can drastically improve performance, boost reliability, and extend service lives of tool and machine components. In addition to conventional PVD hard coatings such as TiN (titanium nitride), so called "tribological coatings " with optimized frictional properties have been developed in recent
    models and strategies are required, in addition to advanced processes and reliable metrology tools. The standard STI etch process involves etching the bottom antireflective coating (BARC), the nitride, the underlying pad oxide, and a shallow trench into the silicon substrate. At the 130-nm
  • Hybrid Ball Bearings
    , alternative ball options become a necessity. The most widely available options for ball bearings are TiC and ceramic balls. TiC balls are 440C stainless steel balls with a titanium carbide coating while ceramic balls consist of silicon nitride, Si3N4, a â polycrystalline material with an amorphous (glassy
  • MICRO:Rosenberg (March 2001)
    nitride (TiN), titanium tungsten, cobalt silicide, tungsten silicide, tantalum, and tantalum nitride. These metal compounds are used for barrier/liner processes because they form high-stress films when deposited. However, high stress, along with plasma and thermal cycling, tends to cause refractory
  • Nanosized resonators show commercial promise
    of 4.5 MHz and a Q of 207,000. Besides having a high quality factor, the stressed silicon-nitride nanostrings are mechanically robust, making them practical for consumer devices. The group has used the nanostrings to detect masses as small as a single bacterium or virus. Coating the device

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  • Nanostructured Coatings
    ...optical and elec- tronic properties, TiN coatings also have been considered for applications such as diffusion barriers in microelectronic devices,77 cosmetic gold-colored surfaces,78 and wavelength-selective transparent optical films.79 Even though titanium nitride coatings already have a dominant...
  • Tribology of Diamond-Like Carbon Films
    13 Tribology of Carbon Nitride Coatings . . . . . . . . . . . . . . . . . . . . . . . . .
  • Surface modification technologies XIII
    ...W. NG, S.C.M. Yu, and Y.C. LAM A Comparative Study of the Performance of Two Diverse Detonation Spray Systems P. SARAVANANK.R.C. SOMARAJU, D. SRINIVASARAo, V. SELVARAJANS.V. JOSHI, and G. SUNDARARAJAN , , Nitride Coatings Surface Oxidation of Aluminum...
  • Diffusion Coatings for Corrosion-Resistant Components in Coal Gasification Systems
    Titanium-Tantalum Nitride Coated Specimens..
  • Advanced Microturbine Systems
    (b) Fracture surface of as silicon nitride coated with the compliant later and Si that failed at 81.4 ksi in bend test 4.2.7 Relative high temperature steam resistance of candidate EBC top layer materials 4.2.8 Dip coated...
  • Encyclopedia of Tribology
    The macroparticle issue is mitigated by the fact that most cathodic arc coatings are nitride coatings (see also ▶ Self-lubricating Hard/Ultra-Hard Coatings) made in reactive mode, using a metal cathode that is at least partially “poisoned�? by the presence of...
  • CIRP Encyclopedia of Production Engineering
    Dasa M, Basua AK, Ghataka S, Joshib AG (2009) Carbothermal synthesis of boron nitride coating on PAN carbon fiber.
  • Cathodic Arcs
    Nitride Coatings for Wear Applications . . . . . . . . . . . . . . .