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Thermal Products
Nor-Cal Products carries a full line of flexible heater jackets for heating exhaust lines, forelines, and gas lines. Custom heaters for valves and other components are available upon request. We maintain a large inventory of heaters for 1 1/2", 2" and 4" tubing, elbows and flanges.
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GEC Reference Cell
At present, the cell is a conventional ultrahigh vacuum (UHV) chamber with a pair of 10 cm diameter, parallel plate electrodes.
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NW Flanges
Nor-Cal NW flanges are designed to ISO 2681 specifications for standard USA tube sizes from .375 to 2.00 inches. They are compatible with other manufacturers' ISO-KF style flanges.
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Sample Transfer System
Nor-Cal's sample transfer system allows sample plate transfer from a rotary/linear feedthrough to the sample dock mounted inside the chamber.
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Load Lock Chamber
Nor-Cal's load lock chambers are provided with a six inch CF flange for mounting to the gate valve, a six inch Add-A-Door.
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Single & Multi-Stage Traps
Increase your system's throughput and extend preventative maintenance intervals by 2X or more with Nor-Cal Products' LPCVD/TEOS multistage foreline traps.
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Viewports
Nor-Cal Products offers a complete line of viewports for vacuum chambers with NW, ISO and CF flanges.
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Thin Film Coating Instrumentation
Our coating instrumentation products support one of the more popular methods of thin film measurement and rate control -- the crystal monitor, which utilizes the piezoelectric properties of a quartz crystal.
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Liquid & Electrical Feedthroughs
Nor-Cal's extensive line of electrical feedthroughs are manufactured from ultra-high vacuum grade materials such as high alumina ceramic insulators, OFHC® copper and nickel conductors, and 304 stainless steel flanges.
Nor-Cal's product line of liquid and liquid nitrogen feedthroughs includes the most commonly required for general, high and ultrahigh vacuum applications.
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Bakeable All-Metal Valves
Nor-Cal's series of metal seal angle valves are intended for use in UHV or cryogenic applications where temperature extremes preclude the use of our elastomer seal valves. Approved for use in beamline facilities, these valves have a temperature operating range from 400°C to -250°C.
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Poppet Valves
Since 1962 we have been improving our designs and expanding our product line in order to offer the vacuum industry stainless steel valves for almost every application. Our valves provide outstanding performance in the most demanding applications such as semiconductor and compound semiconductor processing.
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Ball Valves
Ball valves are a low cost, manually operated, straight through isolation device. Their simple, robust design provides high reliability in "dirty" applications.
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Manual Butterfly Valves
Our manual butterfly valves provide a low-cost alternative to bellows sealed gate valves.
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Stainless Steel Tubing
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Gate Valves
Nor-Cal stainless steel gate valves share with our poppet valves the innovative design, highest grade materials and superior workmanship that has made us a major supplier of valves to the vacuum industry. The estimated service interval on these valves is 100,000 cycles, depending on the application.
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Particulate Traps
These traps remove particles that might enter the mechanical pump and contaminate the oil. A polyester felt filter traps particles over 10 microns in size at 98% efficiency. Filters can be cleaned with a vacuum cleaner. Suitable for process temperatures from ambient to 149ºC.
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Water Cooled Traps
Water cooled traps protect mechanical pumps and other downstream components from condensable process gasses and their by-products. They can extend or eliminate preventative maintenance intervals and pump overhauls.
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Weld Fittings
Nor-Cal Products has manufactured stainless steel weld fittings for nearly forty years. We worked with the Lawrence Livermore National Laboratory in the 60's to develop their specification for vacuum piping, which has become the standard in the industry.
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JV Series Valves
Since 1962, Nor-Cal Products has been improving our valve designs and expanding our product line in order to offer valves for almost every vacuum application. JV series valves are designed to meet the demanding high-cycle requirements of semiconductor equipment manufacturers, yet offer the researcher a cost effective solution for UHV system roughing.
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Vacuum Chambers
Nor-Cal Products has earned a reputation as a world-class manufacturer of high and ultra-high vacuum chambers. Quality, appearance and performance of our chambers are unequaled. We supply one-off chambers designed from customer specifications for university or national laboratory research projects, as well as production quantity chambers that are built-to-print for equipment manufacturers.
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Isolation Pendulum Valves
Nor-Cal Products' pneumatically actuated isolation pendulum valves contain the same patented Penduroll™ mechanism that is found in the Intellisys™ throttling pendulum valves. These valves offer the user a compact and low cost alternative to competitive designs. In addition, the smooth actuation results in low particle generation and rapid open-to-close speeds.
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Adaptive Pressure Controller
The Intellisys Adaptive Pressure Controller (APC) provides advanced control system performance by combining closed loop motor control with adaptive pressure control.
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Throttling Butterfly Valves
The Intellisys throttling butterfly valve's micro-stepped, direct-drive motor eliminates belts, gears and limit switches, extending MTBF while reducing the complexity and size of the drive assembly. High-torque gear drives are also available in all sizes as an option. All wetted parts are made from 316 stainless steel for corrosion resistance.
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Throttling Pendulum Valves (TPV)
Intellisys throttling pendulum valves provide equipment manufacturers with unmatched pressure control performance and low particle generation.
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EVAC Flanges
Nor-Cal Products stocks a complete line of EVAC chain clamps and aluminum metal seals for converting elastomer seal NW (KF) and ISO flanges to UHV metal seals.
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