ULVAC Technologies, Inc. - Product Announcements

Qulee" (pronounced as "KuLee"), is the Japanese word for a 4-leaf clover, and is the name for ULVAC's newest quadrupole residual gas analyzer. This CGM (Compact Gas Monitor) can measure residual gas pressures during processes and achieves high measurement accuracy and resolution up to a high pressure of 1 Pa without the need for differential pumping. (read more)

Conventional leak test methods include the water immersion test, air leak test and halogen test. However with the product quality improvements and production rationalization of recent years, users are demanding leak inspection equipment that provides more reliability, and uses smaller and simpler system devices. (read more)

NLD-6000 provides superior solutions for processes from mask deposition through mask material etching and quartz etching. (read more)

Sputter ion pumps are one type of pumps used to create ultra-high vacuums, and are used in many analyzers and accelerators. ULVAC's acter pumps were developed to enable single sputter ion pumps to create ultra-high and extremely high vacuums on the order of 10^-10 Pa. (read more)

The Enviro Optima™ Resist Strip System is the smallest 300mm resist strip system providing the highest throughput per square meter of cleanroom space at the lowest cost. (read more)

The SME Series is a series of space-saving, low-cost cluster-type sputtering systems ideal for SAW devices and compound semiconductors. The series lets you create a highly cost-effective line tailored to your application. (read more)

The PRC-A Series are improved versions of ULVAC's long-used PMB-003C(M), PMB-006C(M) and PMB-012C(M) models. They have the same evacuation performance with lower noise and greater reliability, and are ideal for use in the dust-sensitive environments required for clean rooms for semiconductor and LC manufacturing processes. (read more)

The D-240DK Series are oil rotary vacuum pumps with direct-coupled motors, designed for use in a wide range of applications such as production processes, lab work and R&D. (read more)

Eco-Shock is a groundbreaking attachment that can be attached to your existing dry pumps to achieve great savings in dry pump power consumption. (read more)

The EX/EBX Series are batch-type high-vacuum evaporation systems created using the benefits of ULVAC's many years of evaporation system technology and experience. (read more)

With the increase in size of LC panels and manufacturing mother glass, manufacturing equipment has also become larger, requiring ever-larger equipment investments. For the past several years, ULVAC has been responding to increasing mother glass sizes by developing new-concept systems to replace the cluster-type systems currently prevalent. (read more)