3M™ Specialty Gases -- PFG-3218
from 3M Electronics Markets Materials Division
from 3M Electronics Markets Materials Division
3 M ™ PFG-3218, or octofluoropropane (C3F8), is high molecular weight perfluorocarbon gas which can be used as a drop-in replacement for C2F6 in chemical vapor deposition (CVD) chamber cleaning. 3M PFG-3218 is used to clean dielectric film build-up from chemical vapor deposition chambers. [See More]
- Application / Function: Semiconductor; Specialty Application; CVD Cleaning
- Composition: Pure
- Industrial Gases: Octofluoropropane
- Concentration: 99.96
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