MicroXAM - 100
from KLA-Tencor Corporation

The KLA-Tencor Development Series of 3D surface profilers offer a complete optical surface profiling solution focusing on the needs of the engineering and research community. Our 3D surface profiler products are designed to match the varied requirements of our customers through the delivery of full... [See More]

  • Display & Special Features: PC Interface / Networkable; FFT Analysis
  • Measurement Capability: Area or three dimensional profile; Roughness; Step Height
  • Technology: Optical / Laser
  • Vertical Range: 0.0098 to 0.3937
3D Optical Profiler -- NewView™ 600s
from Zygo Corporation

Fast 3D noncontact profilometer, manual benchtop unit [See More]

  • Display & Special Features: PC Interface / Networkable; SPC or Analysis Software; Video / Graphic Display; FFT Analysis; Power Spectrum Density (PSD); Stage, 0.5X-100X Objectives, 1X Zoom
  • Measurement Capability: 2D / Line Profile; Area or three dimensional profile; Roughness; Spacing; Waviness; Hybrid Parameters; Defects, dimples or film residues; Flatness; Lay / Pattern; Step Height; Thickness; Warp / Bow
  • Technology: Optical / Laser
  • Specific Parameters / Measurements: Roughness Average; RMS Roughness ; Mean Peak to Valley Height or roughness depth; Maximum Peak Height; Average Peak Height; Maximum Valley Depth; Total Roughness Height; Total Profile Depth or Height; Base Roughness Depth; Maximum Roughness Depth; Ten Point Height; Skewness; Kurtosis; Waviness Average; Waviness Height; Peak Count; Peak Spacing Average; Core Roughness Depth; Bearing or Relative Material Ratio; SlopeRa (Δa); SlopeRMS (Δa); Swedish Height (H), Peak Density, Summit Spacing & Density, 3D Surface Visualization