MarSurf Stationary Instruments PC-based -- XR 20 MarWin
from Mahr Federal Inc.

The entrance into the top class of Mahr surface metrology. The PC-based equipment provides all common parameters and profiles according to international standards. Quick & Easy. is Mahr specific operation help for quick and simple operation convenience. You do not have to be afraid of the high... [See More]

  • Measurement Capability: Area or three dimensional profile; Roughness; Waviness (optional feature)
  • Specific Parameters / Measurements: Roughness Average; RMS Roughness ; Average Peak Height; Maximum Roughness Depth; Ten Point Height; Waviness Average; Waviness Height; Core Roughness Depth; Ra, Rq, Rz (Ry in acc. with JIS corr. to Rz), Rmax, RPc, Rz (JIS), Rt, Rp; Rk, Rpk, Rvk, Rpkx, Rvkx, Mr1, Mr2, A1, A2, Vo
  • Technology: Contact / Stylus
  • Standards Compliance: ASME; ISO / EN; DIN; JIS
MicroTrak II Laser Displacement Sensors -- LTC-025-02
from MTI Instruments Inc.

High Speed Laser Sensor utilizing the Latest CMOS / CCD Technology. The Microtrak II features state-of-the-art CMOS laser triangulation technology for precise measurements of displacement, position, vibration and thickness. Unaffected by surface texture, color or stray light, the Microtrak II Laser... [See More]

  • Measurement Capability: Spacing; Waviness; Defects, dimples or film residues; Flatness; Lay / Pattern; Step Height; Thickness; Warp / Bow
  • Specific Parameters / Measurements: Maximum Peak Height; Maximum Valley Depth; Total Profile Depth or Height
  • Technology: Optical / Laser
  • Vertical Range: 0.9843
Alpha-Step IQ
from KLA-Tencor Corporation

The Alpha-Step IQ stylus-based surface profiler combines high measurement precision with versatility and economy. Ideal for semiconductor pilot lines and materials research, this advanced surface profiler enables faster process learning and higher yields. With guaranteed 8 Ã … (1... [See More]

  • Measurement Capability: 2D / Line Profile; Roughness; Waviness
  • Vertical Range: 0.0787
  • Technology: Contact / Stylus
  • Applications: Coatings / Films; MEMS; Semiconductors
3D Optical Profiler -- NewView™ 600s
from Zygo Corporation

Fast 3D noncontact profilometer, manual benchtop unit [See More]

  • Measurement Capability: 2D / Line Profile; Area or three dimensional profile; Roughness; Spacing; Waviness; Hybrid Parameters; Defects, dimples or film residues; Flatness; Lay / Pattern; Step Height; Thickness; Warp / Bow
  • Specific Parameters / Measurements: Roughness Average; RMS Roughness ; Mean Peak to Valley Height or roughness depth; Maximum Peak Height; Average Peak Height; Maximum Valley Depth; Total Roughness Height; Total Profile Depth or Height; Base Roughness Depth; Maximum Roughness Depth; Ten Point Height; Skewness; Kurtosis; Waviness Average; Waviness Height; Peak Count; Peak Spacing Average; Core Roughness Depth; Bearing or Relative Material Ratio; SlopeRa (Δa); SlopeRMS (Δa); Swedish Height (H), Peak Density, Summit Spacing & Density, 3D Surface Visualization
  • Technology: Optical / Laser
  • Standards Compliance: ASME; ISO / EN; DIN; JIS