Semiconductor Inspection Electron Microscopes Datasheets

inVia Raman Microscope
from Renishaw

Since being launched, the Renishaw inVia Raman microscope has become the world's best selling research Raman system. The inVia Raman microscope combines simplicity of operation with the high performance and unparalleled flexibility for which Renishaw Raman systems are renowned. inVia Raman... [See More]

  • Application: Biological / Life Sciences; Gemological; Metallurgical (optional feature); Measuring / Toolmaker / Inspection (optional feature); Semiconductor; Medical / Forensic
  • Features: Digital Display (optional feature)
  • Microscope Type: Scanning Electron Microscope (optional feature); Transmission Electron Microscope (optional feature); Raman
  • User Interface: Analog (optional feature); Digital (optional feature)
Automated Semiconductor Process Tools -- JFS-9855S / 9955S
from JEOL USA, Inc.

Has a focused ion beam (FIB) milling system, automated wafer metrology [See More]

  • Application: Semiconductor
  • Resolution: 5
  • Microscope Type: Scanning Electron Microscope
  • Features: Digital Display
eDR-5210
from KLA-Tencor Corporation

KLA-Tencor ’s eDR-52xx wafer defect review systems capture high resolution images of wafer defects detected by inspection tools. These images enable defect classification, helping chipmakers to identify systematic defect sources and resolve yield issues. The latest addition to the eDR-52xx... [See More]

  • Application: Semiconductor
  • Features: Digital Display
  • Microscope Type: Scanning Electron Microscope
  • User Interface: Digital