Dielectric / Ceramic Thin Film Equipment Datasheets

Complete Cathode System -- e-Cathode™
from Sputtering Components, Inc.

E-cathode can be equipped with SC, MC, SM, or MM type cathode [See More]

  • Materials Processed: Aluminum; Tungsten; Metal; Silicon; Dielectric or Ceramic; Oxides; Silicides; Nitrides; TCO
  • Process: Physical Vapor Deposition; RF_Sputter; DC Magnetron Sputtering; DC Pulsed Sputtering; MFAC Sputtering
  • Type: Laboratory or Benchtop; Complete Cathode System
  • Applications: Flat Panel Display; Optical Coatings; Photovoltaic or solar cell; Semiconductors
EX/EBX Series -- EBX-1000
from ULVAC Technologies, Inc.

The EX/EBX Series are batch-type high-vacuum evaporation systems created using the benefits of ULVAC's many years of evaporation system technology and experience. ULVAC has released many systems for opto-device soldering and electrode multilayer deposition of compound semiconductors. The EX/EBX... [See More]

  • Materials Processed: Aluminum; Metal; Dielectric or Ceramic; Oxides; Nitrides; ITO, Sulfides
  • Process: Physical Vapor Deposition; Resistance Evaporation; Electron Beam Evaporation; Plasma Etching and Cleaning (optional feature)
  • Type: Batch
  • Applications: Flat Panel Display; Optical Coatings; Photovoltaic or solar cell; Research / Surface Analysis; Semiconductors; Magnetic storage; Production