Dielectric / Ceramic Thin Film Equipment Datasheets

High Vacuum Experimentation Systems -- UNIVEX 300
from Oerlikon Leybold Vacuum USA Inc.

The UNIVEX multi-purpose experimentation systems were developed by LEYBOLD for applications in research and development, as well as for setting up pilot production systems. The range of applications for these systems covers primarily vacuum coating as well as experiments in vacuum process... [See More]

  • Materials Processed: Aluminum; Metal; Silicon; Dielectric or Ceramic; Polymer
  • Process: Physical Vapor Deposition; Resistance Evaporation (optional feature); Electron Beam Evaporation (optional feature); DC_Sputter (optional feature); RF_Sputter (optional feature); Plasma Etching and Cleaning (optional feature); Multiple Processes (optional feature); Rapid Thermal Processing (optional feature); Vacuum Annealing; Vacuum Soldering
  • Type: Batch; Free Standing System
  • Applications: Flat Panel Display; MEMS; Nanomaterials; Optical Coatings; Research / Surface Analysis; Semiconductors; Cutting tool or other wear components; Tribology, Diffusion, Pilot Trials
Physical Vapor Deposition -- METAPLAS-DOMINO
from Oerlikon Metco

System description. The METAPLAS-DOMINO system provides your production process with shorter cycle times and increased productivity. We have designed this system so you can quickly, reliably, and automatically coat an enormous number of individually tailored coatings on ceramic and plastic surfaces. [See More]

  • Materials Processed: Metal; Dielectric or Ceramic
  • Applications: Cutting tool or other wear components
  • Type: Batch
  • Chamber Size: Diameter 300 mm-1200 mm, Height 300 mm to 1200 mm
Complete Cathode System -- e-Cathode™
from Sputtering Components, Inc.

E-cathode can be equipped with SC, MC, SM, or MM type cathode [See More]

  • Materials Processed: Aluminum; Tungsten; Metal; Silicon; Dielectric or Ceramic; Oxides; Silicides; Nitrides; TCO
  • Process: Physical Vapor Deposition; RF_Sputter; DC Magnetron Sputtering; DC Pulsed Sputtering; MFAC Sputtering
  • Type: Laboratory or Benchtop; Complete Cathode System
  • Applications: Flat Panel Display; Optical Coatings; Photovoltaic or solar cell; Semiconductors
EX/EBX Series -- EBX-1000
from ULVAC Technologies, Inc.

The EX/EBX Series are batch-type high-vacuum evaporation systems created using the benefits of ULVAC's many years of evaporation system technology and experience. ULVAC has released many systems for opto-device soldering and electrode multilayer deposition of compound semiconductors. The EX/EBX... [See More]

  • Materials Processed: Aluminum; Metal; Dielectric or Ceramic; Oxides; Nitrides; ITO, Sulfides
  • Process: Physical Vapor Deposition; Resistance Evaporation; Electron Beam Evaporation; Plasma Etching and Cleaning (optional feature)
  • Type: Batch
  • Applications: Flat Panel Display; Optical Coatings; Photovoltaic or solar cell; Research / Surface Analysis; Semiconductors; Magnetic storage; Production