Vacuum Annealing Thin Film Equipment Datasheets

MILA-3000 Series
from ULVAC Technologies, Inc.

Rapid heating and cooling (50 °C/second) [See More]

  • Process: Rapid Thermal Processing; Vacuum Annealing
  • Applications: Semiconductors
  • Type: Laboratory or Benchtop
  • Materials Processed: Silicon; Oxides; Ferro-Electric Films, Glass Substrates