Technology / Process:Other Thin Film Equipment Datasheets

High Vacuum Experimentation Systems -- UNIVEX 450C Cluster Systems
from Oerlikon Leybold Vacuum USA Inc.

For special applications we can also supply cluster systems based on the UNIVEX concept. These clusters are equipped according to customers requirements and incorporate separate processing and load lock and transfer chambers. [See More]

  • Process: Physical Vapor Deposition; Resistance Evaporation (optional feature); Electron Beam Evaporation (optional feature); DC_Sputter (optional feature); RF_Sputter (optional feature); Plasma Etching and Cleaning (optional feature); Multiple Processes (optional feature); Rapid Thermal Processing (optional feature); Vacuum Annealing; Vacuum Soldering
  • Applications: Flat Panel Display (optional feature); MEMS (optional feature); Optical Coatings (optional feature); Semiconductors (optional feature); Cutting tool or other wear components (optional feature); Magnetic storage (optional feature); Customer Specific
  • Type: Free Standing System; Cluster Tool
  • Materials Processed: Aluminum; Metal; Silicon; Dielectric or Ceramic; Polymer