RF Generator DC-DC Converters Datasheets

Apex® RF Power-Delivery Systems
from Advanced Energy Industries, Inc.

The versatile Apex ® family of RF generators and power-delivery systems utilizes sophisticatedRF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film... [See More]

  • Device Type: RF Generator
  • Display: Digital Numerical Display
  • Style: Rack Mount
  • Application: Plasma