RF Generator DC-DC Converters Datasheets
from Advanced Energy Industries, Inc.
The versatile Apex ® family of RF generators and power-delivery systems utilizes sophisticatedRF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film... [See More]
- Device Type: RF Generator
- Display: Digital Numerical Display
- Style: Rack Mount
- Application: Plasma