Semiconductor/Thin Film AC Power Sources Datasheets

CESAR® RF Power Supplies
from Advanced Energy Industries, Inc.

The robust and versatile Cesar ® platform offers exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input... [See More]

  • Application: Plasma; Semiconductor / Thin Film; RF Generator
  • Style: Rack Mount
  • Frequency: 2 to 40.68
  • Phase  : Three-Phase
25A 2 MHz RF Plasma Generators -- NOVA-25
from MKS Instruments, Inc.

NOVA ® Series generators offer advancedRF plasma generation and control for low cost and high yield in themost demanding thin film processing applications. The NOVA ® RF Plasma Generators are ideally suited for PlasmaEnhanced Chemical Vapor Deposition (PECVD), High Density Plasma... [See More]

  • Application: Plasma; Semiconductor / Thin Film; RF Generator; PECVD, Etch
  • Features: Adjustable Frequency
  • Frequency: 1.8 to 2.17
  • Style: Rack Mount