RF Generator AC Power Sources Datasheets
from Advanced Energy Industries, Inc.
The robust and versatile Cesar ® platform offers exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input... [See More]
- Application: Plasma; Semiconductor / Thin Film; RF Generator
- Style: Rack Mount
- Frequency: 2 to 40.68
- Phase : Three-Phase