Three-Phase RF Generators Datasheets

CB Series - High Frequency RF Power -- CB 1000
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 1000 provides 1000 watts of power output in a... [See More]

  • Phase  : Three-Phase
  • Output Power: 1000
  • Frequency: 13.56 to 60
  • Adjustability: Frequency (optional feature)
BIG - P Series -- BIG 100/50 P
from HUETTINGER Electronic, Inc.

Programmable arc management using Digital Signal Processor technology [See More]

  • Phase  : Three-Phase
  • Frequency: 0.0200 to 0.0500
  • Voltage: 0.0 to 1050
  • Adjustability: Frequency
25A 2 MHz RF Plasma Generators -- NOVA-25
from MKS Instruments, Inc.

NOVA ® Series generators offer advancedRF plasma generation and control for low cost and high yield in themost demanding thin film processing applications. The NOVA ® RF Plasma Generators are ideally suited for PlasmaEnhanced Chemical Vapor Deposition (PECVD), High Density Plasma... [See More]

  • Phase  : Three-Phase
  • Output Power: 2500 to 2.74E7
  • Frequency: 1.8 to 2.17
  • Adjustability: Frequency
RFS-A Series -- RFS-1305A
from ULVAC Technologies, Inc.

13 MHz output, high speed auto-matching, pulse output included [See More]

  • Phase  : Three-Phase
  • Style: Rack Mount
  • Output Power: 500
  • Voltage: 208 VAC only; 230 VAC only; 200/220 VAC