Three-Phase RF Generators Datasheets

CESAR® RF Power Supplies
from Advanced Energy Industries, Inc.

The robust and versatile Cesar ® platform offers exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input... [See More]

  • Phase  : Three-Phase
  • Output Power: 600 to 5000
  • Frequency: 2 to 40.68
  • Style: Rack Mount
CB Series - High Frequency RF Power -- CB 1000
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 1000 provides 1000 watts of power output in a... [See More]

  • Phase  : Three-Phase
  • Output Power: 1000
  • Frequency: 13.56 to 60
  • Adjustability: Frequency (optional feature)
BIG - P Series -- BIG 100/50 P
from HUETTINGER Electronic, Inc.

Programmable arc management using Digital Signal Processor technology [See More]

  • Phase  : Three-Phase
  • Frequency: 0.0200 to 0.0500
  • Voltage: 0.0 to 1050
  • Adjustability: Frequency
Induction Heating Inverter - Standard Dual Inverter Systems -- IHI2-100K-480-M
from Mesta Electronics, Inc.

Features and Benefits. Provides optimal precision and control with output power control resolution of .00625%. Provides greater control stability by varying output voltage instead of frequency. Increased productivity and decreased maintenance costs compared to water cooled systems. Offers efficiency... [See More]

  • Phase  : Three-Phase
  • Output Power: 25000 to 75000
  • Frequency: 0.0090 to 0.0110
  • Style: Enclosed; Wall Mount (optional feature)
25A 2 MHz RF Plasma Generators -- NOVA-25
from MKS Instruments, Inc.

NOVA ® Series generators offer advancedRF plasma generation and control for low cost and high yield in themost demanding thin film processing applications. The NOVA ® RF Plasma Generators are ideally suited for PlasmaEnhanced Chemical Vapor Deposition (PECVD), High Density Plasma... [See More]

  • Phase  : Three-Phase
  • Output Power: 2500 to 2.74E7
  • Frequency: 1.8 to 2.17
  • Adjustability: Frequency
RFS-A Series -- RFS-1305A
from ULVAC Technologies, Inc.

13 MHz output, high speed auto-matching, pulse output included [See More]

  • Phase  : Three-Phase
  • Style: Rack Mount
  • Output Power: 500
  • Voltage: 208 VAC only; 230 VAC only; 200/220 VAC