480 VAC RF Generators Datasheets
from Advanced Energy Industries, Inc.
Used primarily as a plasma generator for 200 and 300 mm wafer processing, flat panel display (FPD), and DVD equipment, the flexible HFV ® generator offers process consistency for ionized physical vapor deposition (IPVD), CVD, and etch. This versatile power generator ’s features include... [See More]
- Voltage: 208 VAC only; 480 VAC only; 400 V
- Output Power: 5000 to 8000
- Frequency: 1.76 to 2.17
- Style: Rack Mount
from Comdel, Inc.
Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The CLB 12K provides 12000 watts of power. The Turbotune... [See More]
- Voltage: 208 VAC only; 230 VAC only; 480 VAC only; 208-480 VAC
- Output Power: 3000
- Frequency: 0.0200 to 2
- Adjustability: Frequency
from Mesta Electronics, Inc.
Features and Benefits. Provides optimal precision and control with output power control resolution of .00625%. Provides greater control stability by varying output voltage instead of frequency. Increased productivity and decreased maintenance costs compared to water cooled systems. Offers efficiency... [See More]
- Voltage: 480 VAC only; 380
- Output Power: 25000 to 75000
- Frequency: 0.0090 to 0.0110
- Style: Enclosed; Wall Mount (optional feature)