25A 2 MHz RF Plasma Generators -- NOVA-25
from MKS Instruments, Inc.

NOVA ® Series generators offer advancedRF plasma generation and control for low cost and high yield in themost demanding thin film processing applications. The NOVA ® RF Plasma Generators are ideally suited for PlasmaEnhanced Chemical Vapor Deposition (PECVD), High Density Plasma... [See More]

  • Application: Plasma; Semiconductor / Thin Film; RF Generator; PECVD, Etch
  • Output Power: 2500 to 2.74E7
  • Frequency: 1.8 to 2.17
  • Adjustability: Frequency
RFS-A Series -- RFS-1305A
from ULVAC Technologies, Inc.

13 MHz output, high speed auto-matching, pulse output included [See More]

  • Application: High Frequency; Semiconductor / Thin Film; RF Generator
  • Style: Rack Mount
  • Output Power: 500
  • Phase  : Three-Phase