DC Output RF Generators Datasheets

LFGS RF Generators
from Advanced Energy Industries, Inc.

The versatile, variable-frequency LFGS RF generator (1250 W, 40 to 500 kHz) suits a wide variety of semiconductor and general plasma-processing applications, including sputtering, reactive ion etching, plasma deposition, polymerization, and surface treatment. Its compact 19", rack-mountable,... [See More]

  • Features: DC Output; Fan Cooled; Overcurrent Protection; Overvoltage Protection
  • Output Power: 15 to 1250
  • Frequency: 0.0400 to 0.5000
  • Style: Rack Mount
CLB Series - Low Frequency RF Power -- CLB 12K
from Comdel, Inc.

Comdel's Superior Design and Reliability in a Small, Lightweight Package. Performance: RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The CLB 12K provides 12000 watts of power. The Turbotune... [See More]

  • Features: DC Output
  • Output Power: 3000
  • Frequency: 0.0200 to 2
  • Adjustability: Frequency
AMS Series -- AMS-0.6B50
from Matsusada Precision, Inc.

High speed response, all solid state, various output waveforms [See More]

  • Features: Computer Interface; DC Output; Overcurrent Protection; Overvoltage Protection; Short Circuit Protection
  • Phase  : Single-Phase
  • Style: Enclosed; Rack Mount
  • Voltage: 115 VAC only