PFG-RF Series -- PFG 300 RF
from HUETTINGER Electronic, Inc.

The PFG-RF series of products offers a range of radio frequency generators for plasma excitation. Power ratings are optimized to industrial process requirements. The power ratings of the PFG-RF series range from 0.3 kW to 5 kW, at an operating frequency of 13.56 MHz. Proven applications are etching... [See More]

  • Features: Fan Cooled
  • Style: Enclosed; Rack Mount
  • Frequency: ? to 13.56
  • Phase  : Three-Phase
RFS-A Series -- RFS-1305A
from ULVAC Technologies, Inc.

13 MHz output, high speed auto-matching, pulse output included [See More]

  • Features: Computer Interface; Fan Cooled
  • Style: Rack Mount
  • Output Power: 500
  • Phase  : Three-Phase