from HUETTINGER Electronic, Inc.
The PFG-RF series of products offers a range of radio frequency generators for plasma excitation. Power ratings are optimized to industrial process requirements. The power ratings of the PFG-RF series range from 0.3 kW to 5 kW, at an operating frequency of 13.56 MHz. Proven applications are etching... [See More]
- Features: Fan Cooled
- Style: Enclosed; Rack Mount
- Frequency: ? to 13.56
- Phase : Three-Phase