Fan Cooled RF Generators Datasheets

CLF Series - Low Frequency RF Power -- CLF 1000 Full Rack
from Comdel, Inc.

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications. Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 1000 provides 1000 watts of power. The full- rack models operate at any fixed frequency from 20 to 450 kHz or... [See More]

  • Features: Computer Interface; Fan Cooled; Overcurrent Protection; Overvoltage Protection; Pure Sine Output; Short Circuit Protection; Cooling by Forced Air
  • Output Power: 1000
  • Frequency: 0.0200 to 0.4500
  • Adjustability: Frequency
PFG-RF Series -- PFG 300 RF
from HUETTINGER Electronic, Inc.

The PFG-RF series of products offers a range of radio frequency generators for plasma excitation. Power ratings are optimized to industrial process requirements. The power ratings of the PFG-RF series range from 0.3 kW to 5 kW, at an operating frequency of 13.56 MHz. Proven applications are etching... [See More]

  • Features: Fan Cooled
  • Style: Enclosed; Rack Mount
  • Frequency: ? to 13.56
  • Phase  : Three-Phase
RFS-A Series -- RFS-1305A
from ULVAC Technologies, Inc.

13 MHz output, high speed auto-matching, pulse output included [See More]

  • Features: Computer Interface; Fan Cooled
  • Style: Rack Mount
  • Output Power: 500
  • Phase  : Three-Phase

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