from MKS Instruments, Inc.
The Resist-Torr ® modules consider manydifferent parameters of the degas step and combine that data to provideinformation in the form of a meaningful number, without the need foruser-interpretation. This measurement, termed the PR Index ®, is ameasure of photoresist contamination that can... [See More]
- Detector Type: Electron Multiplier Tube; Faraday Cup
- Ionization Method: Electron Ionization
- Mass Analyzer Design: Quadrupole
- Remote Interface: Computer Interface