Gas Analysis System for Evolved Gas Analysis -- HPR-20
from Hiden Analytical

The HPR QIC-20 gas analysis system is a compact bench-top gas analysis system for monitoring gases and processes at pressures up to atmosphere. [See More]

  • Detector Type: Electron Multiplier Tube; Faraday Cup
  • Mass Analyzer Design: Quadrupole
  • Mass Range: ? to 510
  • Ionization Method: Electron Ionization
200mm Detection Monitor -- 300mm Resist-Torr
from MKS Instruments, Inc.

The Resist-Torr ® modules consider manydifferent parameters of the degas step and combine that data to provideinformation in the form of a meaningful number, without the need foruser-interpretation. This measurement, termed the PR Index ®, is ameasure of photoresist contamination that can... [See More]

  • Detector Type: Electron Multiplier Tube; Faraday Cup
  • Ionization Method: Electron Ionization
  • Mass Analyzer Design: Quadrupole
  • Remote Interface: Computer Interface
REGA -- RG-101
from ULVAC Technologies, Inc.

Total pressure measurement, compact and lightweight sensor unit [See More]

  • Detector Type: Faraday Cup
  • Partial Pressure: 1.45E-12
  • Mass Range: 1 to 100
  • Maximum Operating Pressure: 7.50E-5