Materials Processed (Deposit or Substrate):Other MEMS Processing Equipment Datasheets

Precision Oscillating Polishing Machine -- LLCD Optical Polishing Machine
from Lapmaster-Wolters International

Designated the LLCD series, a typical machine consists of a heavy duty, structural steel base housing a drive system linked to a lapping plate. A polishing pad (type dependent on material to be processed) is bonded directly to the plate. [See More]

  • Materials Processed: Metal; Silicon; Dielectric or Ceramic; Oxides; Glass Substrates
  • Process: Polishing, Lapping, Planarizing
  • Type: Batch; Continuous Web or Wire Coater; Inline or Semicontinuous
  • Applications: Flat Panel Display; MEMS; Optical Coatings; Semiconductors; Magnetic storage
Benchtop Plasma Cleaner -- PE-50 XL
from Plasma Etch, Inc.

As in all Plasma Etch systems a capacitive parallel plate design is used for the most effective plasma generation. Competitive units with glass/quartz barrel chambers cannot penetrate the vacuum containment vessel and therefore are restricted to inductive coupling using an RF coil wrapped around the... [See More]

  • Materials Processed: Tungsten; Metal; Gallium Arsenide or Compound Semiconductors; Precious Metals
  • Process: Plasma Etching and Cleaning
  • Type: Laboratory or Benchtop
  • Applications: MEMS; Photovoltaic or solar cell; Research / Surface Analysis; Semiconductors; Medical; Printed Circuit Boards