Polymer / Organic MEMS Processing Equipment Datasheets
from Leybold USA Inc.
UNIVEX 400. The UNIVEX 400 is a compact coating system for laboratory tasks, respectively pilot production runs. Due to its chamber dimensions, it is ideal for coating of small to medium sized substrates. In the vacuum chamber which is 420 mm wide, substrates respectively substrate holders up to an... [See More]
- Materials Processed: Metal; Polymer; Gallium Arsenide or Compound Semiconductors
- Process: Physical Vapor Deposition; Resistance Evaporation (optional feature); DC Magnetron Sputtering (optional feature); Ion Beam Assisted Deposition (optional feature)
- Type: Batch; Free Standing System
- Applications: MEMS; Optical Coatings; Photovoltaic or solar cell; Semiconductors