Flat Panel Displays Wafer and Thin Film Instrumentation Datasheets

Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01
from KEYENCE

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
  • Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Technology: Interferometer
APTI Buttons
from KLA-Tencor Corporation

APTI (Arrays of Peak Temperature Indicators) buttons are a unique temperature measurement tool from SensArray for measuring and profiling peak temperature using non-reversible temperature indicators. APTI buttons are ideally suited for plasma and other semiconductor and flat panel display processes... [See More]

  • Applications: Flat panel display
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Sensor or sensing element
  • Technology: Arrays of Peak Temperature Indicators
CRTM Series -- CRTM-6000
from ULVAC Technologies, Inc.

High resolution, high speed sampling, long life span [See More]

  • Applications: Wafer; CVD / PVD; Flat panel display; Optical components or lenses
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument; Controller
  • Technology: Quartz crystal microbalance
Auto Focus & Tracking System -- ATF-6CM
from WDI Wise Device Inc.

WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]

  • Applications: Wafer; CVD / PVD; Flat panel display; Photolithography
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Sensor or sensing element
  • Technology: Optical / Imaging