Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument
  • Technology: Reflectometer
Advanced Langmuir Probe -- ESPion
from Hiden Analytical

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]

  • Applications: Etching; Ion/Electron Collection, Ion Flux
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Controller; ProbingSystem
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Applications: CVD / PVD; Polymer or photoresist films; BioFilms
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
BakeTemp
from KLA-Tencor Corporation

Wireless BakeTemp SensorWafers offer precise, in-situ temperature monitoring of resist track bake plates. Proprietary sensor technology accurately characterizes the actual production wafer thermal processes. As SensorWafers are built on production grade silicon wafers, standard wafer-handling track... [See More]

  • Applications: Wafer; Temperature
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Sensor or sensing element
  • Technology: 64-Point Temperature Sensorwafer
Micro System Analyzer -- MSA-500
from Polytec, Inc.

The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler... [See More]

  • Applications: Surface Topography
  • Mounting / Loading: Manual loading
  • Form Factor: Sensor or sensing element
  • Technology: Optical / Imaging; Laser Doppler Vibrometry
Laser Diode Bar Tester
from TELOPS, Inc.

The laser diode bar tester picks up each laser diode bar from the tape and measures LIV, wavelength and FFP characteristics for each die. [See More]

  • Applications: Packaged IC or substrate; Optical components or lenses; Laser Diode Bar Tester
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument; ProbingSystem
  • Technology: Optical / Imaging; IV system or SMU; Wafer sorter or prober
Laser Machining Microscope -- MIC4
from WDI Wise Device Inc.

This is the only commercially available microscope guaranteeing transmission of more then 80% for all four YAG laser harmonics: 266, 355, 532, and 1064nm - without compromising the review channel fidelity. The MIC4 microscope is instrumental in laser repair of TFT arrays over the wavelength ranging... [See More]

  • Applications: CVD / PVD; Electroplate; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography; PV Cell, Laser Micromachining, Photomask
  • Mounting / Loading: In-process, in-situ or system mounted (optional feature); Floor (optional feature)
  • Form Factor: Monitor or instrument
  • Technology: Optical / Imaging
Metrology System -- Z3D-7000 Series
from Zygo Corporation

Simultaneously measures multiple parameters [See More]

  • Applications: Wafer; CVD / PVD; Electroplate; Polishing / CMP; Photolithography; Etching; Bumping Processes
  • Mounting / Loading: In-line; Floor
  • Form Factor: Monitor or instrument
  • Technology: Profilometer or AFM; Optical / Imaging; Interferometer