from Bruker Nano Surfaces Division
Micro-mechanical tests have been used to measure mechanical properties of coatings or bulk materials. Instrumented micro-mechanical test improves on the traditional ones by providing in-situ load-displacement data and by using advanced signals like acoustic emission, ECR, friction, etc. for more... [See More]
- Applications: Wafer; Memory drive disc or head; CVD / PVD; Optical components or lenses; Solar Cells, MEMS, Fuel Cells
- Mounting / Loading: Manual loading
- Form Factor: Monitor or instrument
- Technology: Scratch Tester
from Hiden Analytical
The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]
- Applications: Etching; Ion/Electron Collection, Ion Flux
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Controller; ProbingSystem
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
from StellarNet, Inc.
TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 µm for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]
- Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Monitor or instrument
- Technology: Reflectometer
from Imego
MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]
- Applications: CVD / PVD; Polymer or photoresist films; BioFilms
- Mounting / Loading: In-process, in-situ or system mounted; Floor
- Form Factor: ProbingSystem; Sensor or sensing element
- Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
from KLA-Tencor Corporation
Wireless BakeTemp SensorWafers offer precise, in-situ temperature monitoring of resist track bake plates. Proprietary sensor technology accurately characterizes the actual production wafer thermal processes. As SensorWafers are built on production grade silicon wafers, standard wafer-handling track... [See More]
- Applications: Wafer; Temperature
- Mounting / Loading: In-process, in-situ or system mounted
- Form Factor: Sensor or sensing element
- Technology: 64-Point Temperature Sensorwafer
from Polytec, Inc.
The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler... [See More]
- Applications: Surface Topography
- Mounting / Loading: Manual loading
- Form Factor: Sensor or sensing element
- Technology: Optical / Imaging; Laser Doppler Vibrometry
from TELOPS, Inc.
The laser diode bar tester picks up each laser diode bar from the tape and measures LIV, wavelength and FFP characteristics for each die. [See More]
- Applications: Packaged IC or substrate; Optical components or lenses; Laser Diode Bar Tester
- Mounting / Loading: Floor
- Form Factor: Monitor or instrument; ProbingSystem
- Technology: Optical / Imaging; IV system or SMU; Wafer sorter or prober
from WDI Wise Device Inc.
This is the only commercially available microscope guaranteeing transmission of more then 80% for all four YAG laser harmonics: 266, 355, 532, and 1064nm - without compromising the review channel fidelity. The MIC4 microscope is instrumental in laser repair of TFT arrays over the wavelength ranging... [See More]
- Applications: CVD / PVD; Electroplate; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography; PV Cell, Laser Micromachining, Photomask
- Mounting / Loading: In-process, in-situ or system mounted (optional feature); Floor (optional feature)
- Form Factor: Monitor or instrument
- Technology: Optical / Imaging
from Zygo Corporation
Simultaneously measures multiple parameters [See More]
- Applications: Wafer; CVD / PVD; Electroplate; Polishing / CMP; Photolithography; Etching; Bumping Processes
- Mounting / Loading: In-line; Floor
- Form Factor: Monitor or instrument
- Technology: Profilometer or AFM; Optical / Imaging; Interferometer
