Polymers / Photoresists Wafer and Thin Film Instrumentation Datasheets

from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Applications: CVD / PVD; Polymer or photoresist films; BioFilms
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
from ULVAC Technologies, Inc.

The principle of the measurement method is shown below. A portion of a rectangular film specimen is heated by a modulated laser beam, which is a line heat source, made by scanning the laser spot rapidly with constant speed in the width direction of the specimen. Temperature waves, which propagate... [See More]

  • Applications: CVD / PVD; Polymer or photoresist films
  • Mounting / Loading: Manual loading
  • Form Factor: Monitor or instrument
  • Technology: Modulated Laser Beam