Sensor / Sensing Element Wafer and Thin Film Instrumentation Datasheets

Dual Crystal Sensor
from Nor-Cal Products, Inc. - The Vacuum Experts

Crystal Sensors are available in single and dual crystal versions. Typically single crystal sensors are used for short runs, with dual crystal sensors being used for longer runs. Dual crystal sensors operate with a pneumatically actuated shutter; only one crystal is used at a time. Both versions are... [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Quartz crystal microbalance
Wafer Reader -- In-Sight® 1740 series
from Cognex Corporation

The intensely competitive global semiconductor industry demands ever more rigorous control of increasingly complex processes in order to maximize tool utilization and production yield; there is zero margin for error. The need to track wafers throughout back-end processing has never been more vital... [See More]

  • Form Factor: Sensor or sensing element
  • Applications: Wafer
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Automatic Identification for Wafer Traceability
MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Applications: CVD / PVD; Polymer or photoresist films; BioFilms
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01
from KEYENCE

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Technology: Interferometer
  • Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
  • Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
EtchTemp
from KLA-Tencor Corporation

EtchTemp, the next-generation in-situ plasma etch wafer temperature measurement product, captures the effect of the process environment on production wafers and offers unique new capabilities to robustly characterize the high-power, high-frequency etch wafer recipes proliferating at 65nm nodes and... [See More]

  • Form Factor: Sensor or sensing element
  • Technology: 65-Point Temperature Sensorwafer
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer; Temperature
Semi-Automated Wafer Measurement System -- Proforma™ 200SA
from MTI Instruments Inc.

The Proforma 200SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 75 to 200 mm. wafers, the 200SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around... [See More]

  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Applications: Wafer
High Temp Microbalance Sensor Crystal -- Type R-20
from Piezocryst Advanced Sensorics GmbH

High temp stability up to 850 °C, high Q factor around 70000 [See More]

  • Form Factor: Sensor or sensing element
  • Applications: CVD / PVD
  • Technology: Quartz crystal microbalance
  • Measurements: Deposition rate; FilmThickness
Micro System Analyzer -- MSA-500
from Polytec, Inc.

The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler... [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Optical / Imaging; Laser Doppler Vibrometry
  • Mounting / Loading: Manual loading
  • Applications: Surface Topography
CRTS Series -- CRTS-0
from ULVAC Technologies, Inc.

Sensor with no water cooling pipe jacket [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Quartz crystal microbalance
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer; CVD / PVD; Flat panel display; Optical components or lenses
Auto Focus & Tracking System -- ATF-6CM
from WDI Wise Device Inc.

WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Optical / Imaging
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer; CVD / PVD; Flat panel display; Photolithography