Wafer Reader -- In-Sight® 1740 series
from Cognex Corp.

The intensely competitive global semiconductor industry demands ever more rigorous control of increasingly complex processes in order to maximize tool utilization and production yield; there is zero margin for error. The need to track wafers throughout back-end processing has never been more vital... [See More]

  • Form Factor: Sensor or sensing element
  • Applications: Wafer
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Automatic Identification for Wafer Traceability
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01
from KEYENCE

SI-F Series Spectral Interference Displacement Meter. The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the... [See More]

  • Form Factor: Monitor or instrument; Controller; Sensor or sensing element
  • Technology: Interferometer
  • Mounting / Loading: In-process, in-situ or system mounted; In-line; Floor
  • Applications: Wafer; Memory drive disc or head; Flat panel display; Packaged IC or substrate
Geometry Inspection System for Silicon Ingots
from Micro-Epsilon

The “dimensionCONTROL 8260 for Ingot ” measuring system inspects the surface of the bricks using several laser line scanners and in doing so measures the side lengths, phase lengths, angles, diagonal surfaces and the planarity of the side surfaces completely automatically. The system... [See More]

  • Form Factor: Sensor or sensing element
  • Measurements: Defects, dimples or film residues; Flatness
  • Applications: Wafer
  • Wafer / Part Size: 0 to 2500
Geometry Inspection System for Silicon Ingots
from Micro-Epsilon Group

The “dimensionCONTROL 8260 for Ingot ” measuring system inspects the surface of the bricks using several laser line scanners and in doing so measures the side lengths, phase lengths, angles, diagonal surfaces and the planarity of the side surfaces completely automatically. The system... [See More]

  • Form Factor: Sensor or sensing element
  • Measurements: Defects, dimples or film residues; Flatness
  • Applications: Wafer
  • Wafer / Part Size: 0 to 2500
Semi-Automated Wafer Measurement System -- Proforma™ 200SA
from MTI Instruments Inc.

The Proforma 200SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 75 to 200 mm. wafers, the 200SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around... [See More]

  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Applications: Wafer
Crystal Feedthrough -- 1 Inch Bolt
from Nor-Cal Products, Inc.

Materials. Feedthrough: 304 stainless steel. Vacuum range: >1 x 10-9 Torr - High. vacuum. Temperature range: <150 ºC. Leak rate: <10-9 standard cc/sec. Baseplate thickness: 1 inch. maximum [See More]

  • Form Factor: Sensor or sensing element
  • Applications: Wafer
  • Technology: Quartz crystal microbalance
MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Applications: CVD / PVD; Polymer or photoresist films; BioFilms
APTI Buttons
from KLA-Tencor Corporation

APTI (Arrays of Peak Temperature Indicators) buttons are a unique temperature measurement tool from SensArray for measuring and profiling peak temperature using non-reversible temperature indicators. APTI buttons are ideally suited for plasma and other semiconductor and flat panel display processes... [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Arrays of Peak Temperature Indicators
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Flat panel display
High Temp Microbalance Sensor Crystal -- Type R-20
from Piezocryst Advanced Sensorics GmbH

High temp stability up to 850 °C, high Q factor around 70000 [See More]

  • Form Factor: Sensor or sensing element
  • Applications: CVD / PVD
  • Technology: Quartz crystal microbalance
  • Measurements: Deposition rate; FilmThickness
Micro System Analyzer -- MSA-500
from Polytec, Inc.

The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler... [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Optical / Imaging; Laser Doppler Vibrometry
  • Mounting / Loading: Manual loading
  • Applications: Surface Topography
CRTS Series -- CRTS-0
from ULVAC Technologies, Inc.

Sensor with no water cooling pipe jacket [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Quartz crystal microbalance
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer; CVD / PVD; Flat panel display; Optical components or lenses
Auto Focus & Tracking System -- ATF-6CM
from WDI Wise Device Inc.

WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes. [See More]

  • Form Factor: Sensor or sensing element
  • Technology: Optical / Imaging
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer; CVD / PVD; Flat panel display; Photolithography