Thin Film Monitors -- PV-1000
from MTI Instruments Inc.

Using MTII ’s exclusive Push/Pull capacitance probe technology, each PV-1000 module provides up to three pairs of probes for measurement of maximum, minimum and average thickness, as well as total thickness variation (TTV) and wafer bow. For applications requiring additional thickness... [See More]

  • Measurements: Deposition rate (optional feature); Dopant or carrier concentration (resistivity) (optional feature); Flatness; CMP, etching, process gas or plasma diagnostics; FilmThickness (optional feature); Roughness / Waviness; Microstructure or crystal structure; WaferThickness; Area mapping
  • Mounting / Loading: In-line; Manual loading; Floor
  • Form Factor: Controller; Sensor or sensing element
  • Technology: Capacitance or electromagnetic gage
Advanced Langmuir Probe -- ESPion
from Hiden Analytical

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]

  • Measurements: Deposition rate
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Controller; ProbingSystem
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics; FilmThickness; Curing Rate
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
High Temp Microbalance Sensor Crystal -- Type R-20
from Piezocryst Advanced Sensorics GmbH

High temp stability up to 850 °C, high Q factor around 70000 [See More]

  • Measurements: Deposition rate; FilmThickness
  • Technology: Quartz crystal microbalance
  • Form Factor: Sensor or sensing element
  • Applications: CVD / PVD
CRTM Series -- CRTM-6000
from ULVAC Technologies, Inc.

High resolution, high speed sampling, long life span [See More]

  • Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics; FilmThickness
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument; Controller
  • Technology: Quartz crystal microbalance