Deposition Rate Wafer and Thin Film Instrumentation Datasheets

Deposition Monitor, 2 Channels
from Nor-Cal Products, Inc.

Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor... [See More]

  • Measurements: Deposition rate; FilmThickness
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument
  • Technology: Quartz crystal microbalance
Thin Film Deposition Monitor -- F30 Series
from Filmetrics, Inc.

The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]

  • Measurements: Deposition rate; Optical constants (n or k); FilmThickness
  • Mounting / Loading: In-line
  • Form Factor: Monitor or instrument
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
Advanced Langmuir Probe -- ESPion
from Hiden Analytical

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia. [See More]

  • Measurements: Deposition rate
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Controller; ProbingSystem
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
MerMaid
from Imego

MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of... [See More]

  • Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics; FilmThickness; Curing Rate
  • Mounting / Loading: In-process, in-situ or system mounted; Floor
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Technology: Quartz crystal microbalance; Magnetoelastic Resonance Sensors (MER)
High Temp Microbalance Sensor Crystal -- Type R-20
from Piezocryst Advanced Sensorics GmbH

High temp stability up to 850 °C, high Q factor around 70000 [See More]

  • Measurements: Deposition rate; FilmThickness
  • Technology: Quartz crystal microbalance
  • Form Factor: Sensor or sensing element
  • Applications: CVD / PVD
CRTM Series -- CRTM-6000
from ULVAC Technologies, Inc.

High resolution, high speed sampling, long life span [See More]

  • Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics; FilmThickness
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument; Controller
  • Technology: Quartz crystal microbalance

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