SigmaTech Wafer Metrology Systems -- UltraMap-100B
from MicroSense, LLC

Benchtop, automated Thickness measurement systems. Cassette to cassette or manual loading. Exclusive sensing technology with dual White light chromatic coding probes (10nm resolution). Wafer 2 ” to 4 ” (50 to 100mm). Thickness range: 50um to 3mm. Throughput up to 100W/hours. 2D & 3D... [See More]

  • Mounting / Loading: Manual loading
  • Technology: Optical / Imaging
  • Form Factor: Monitor or instrument
  • Applications: Wafer
Semi-Automated Wafer Measurement System -- Proforma™ 200SA
from MTI Instruments Inc.

The Proforma 200SA is a semi-automated thickness measurement system for both semiconducting and semi-insulating wafer materials. Capable of handling 75 to 200 mm. wafers, the 200SA provides highly accurate, repeatable measurements of thickness, TTV, bow, warp, site and global flatness. Built around... [See More]

  • Mounting / Loading: Manual loading
  • Technology: Capacitance or electromagnetic gage
  • Form Factor: ProbingSystem; Sensor or sensing element
  • Applications: Wafer
11000 Series -- 1110XB
from Cascade Microtech, Inc.

Features high-temperature ceramic low-noise probes [See More]

  • Mounting / Loading: Manual loading
  • Technology: Optical / Imaging
  • Form Factor: ProbingSystem
  • Applications: Wafer
iWafer Base Station
from KLA-Tencor Corporation

Deployed robotically from the SensArray Base Station using standard wafer handling equipment, the Integrated or Integral SensorWafer begins its survey of the production path. When the process is complete, the base station manages downloading and communication of wafer data. The 300mm base station is... [See More]

  • Mounting / Loading: Manual loading
  • Technology: Uploads data from Integral SensorWafer
  • Form Factor: Monitor or instrument
  • Applications: Wafer
Wafer Inspection System -- MX51
from Olympus America Inc.

The Olympus MX51 industrial inspection microscope is optimized for the inspection requirements of a variety of electronic components including semiconductor wafer inspection. Its compact size, ease of operation, 6"x6" stage travel and cost effectiveness make the MX51 an ideal inspection microscope... [See More]

  • Mounting / Loading: In-line (optional feature); Manual loading
  • Technology: Optical / Imaging
  • Form Factor: Monitor or instrument
  • Applications: Wafer
Micro System Analyzer -- MSA-500
from Polytec, Inc.

The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler... [See More]

  • Mounting / Loading: Manual loading
  • Technology: Optical / Imaging; Laser Doppler Vibrometry
  • Form Factor: Sensor or sensing element
  • Applications: Surface Topography
IRIS DIE & Wafer Inspection Systems -- WIS Manual Inspection with Automated Stage
from SemiProbe

SemiProbe IRIS inspection systems inspect, locate and identify defects created during wafer manufacturing, probing, bumping, dicing or general handling, providing microelectronic device manufacturers with accurate, timely quality assurance and process information. The IRIS inspection system has... [See More]

  • Mounting / Loading: Manual loading
  • Technology: Optical / Imaging
  • Form Factor: ProbingSystem
  • Applications: Wafer (optional feature)
LaserPIT
from ULVAC Technologies, Inc.

The principle of the measurement method is shown below. A portion of a rectangular film specimen is heated by a modulated laser beam, which is a line heat source, made by scanning the laser spot rapidly with constant speed in the width direction of the specimen. Temperature waves, which propagate... [See More]

  • Mounting / Loading: Manual loading
  • Technology: Modulated Laser Beam
  • Form Factor: Monitor or instrument
  • Applications: CVD / PVD; Polymer or photoresist films
EDXRF Analyzer -- EX-6600 SDD
from Xenemetrix Ltd.

EX-6600 SDD. Secondary Target EDXRF. Xenemetrix ’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates... [See More]

  • Mounting / Loading: Manual loading; Floor
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
  • Form Factor: Monitor or instrument
  • Applications: Wafer; CVD / PVD; Electroplate
NewView 7200 -- 3D Optical Profiling System
from Zygo Corporation

Excellent precision and accuracy [See More]

  • Mounting / Loading: Manual loading
  • Technology: Profilometer or AFM; Optical / Imaging; Interferometer
  • Form Factor: Monitor or instrument
  • Applications: Wafer; Memory drive disc or head; Packaged IC or substrate; Optical components or lenses; Surface Topography, Micromachining