Capacitance / EM Gage Wafer and Thin Film Instrumentation Datasheets

Ultra Gage -- 9500
from KLA-Tencor Corporation

Multi-tool functionality including thickness, shape stress, global and site flatness measurements. Measures 8,700 data points in under 60 seconds. Thin film stress on patterned or monitor wafers. Wide range of options including wafer typing. The 9500 UltraGage is a versatile, multifunctional... [See More]

  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: Manual loading
  • Form Factor: ProbingSystem
  • Applications: Wafer; Polishing / CMP; Photolithography
MESEC
from ULVAC Technologies, Inc.

Provides a broad range of specs suitable for various R & D applications [See More]

  • Technology: Capacitance or electromagnetic gage
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument
  • Applications: Wafer; CVD / PVD