Ellipsometer Wafer and Thin Film Instrumentation Datasheets

In-Line Spectroscopic Ellipsometer -- UVISEL
from HORIBA Scientific

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems. The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data... [See More]

  • Technology: Ellipsometer; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: Floor
  • Form Factor: Monitor or instrument; Controller
  • Applications: Wafer; CVD / PVD
Candela -- CS20
from KLA-Tencor Corporation

The Candela CS20 system simultaneously measures surface reflectivity and topography for automatic defect detection and classification. The system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for... [See More]

  • Technology: Ellipsometer; Reflectometer; Optical / Imaging
  • Mounting / Loading: Floor
  • Form Factor: ProbingSystem
  • Applications: Wafer; CVD / PVD
ESM Series -- 1T/1AT
from ULVAC Technologies, Inc.

Provides a broad range of specs suitable for various R & D applications [See More]

  • Technology: Ellipsometer
  • Mounting / Loading: In-process, in-situ or system mounted
  • Form Factor: Monitor or instrument
  • Applications: Wafer; CVD / PVD