High Vacuum Experimentation Systems -- UNIVEX 450C Cluster Systems
from Oerlikon Leybold Vacuum USA Inc.
from Oerlikon Leybold Vacuum USA Inc.
For special applications we can also supply cluster systems based on the UNIVEX concept. These clusters are equipped according to customers requirements and incorporate separate processing and load lock and transfer chambers. [See More]
- Materials Processed: Aluminum; Metal; Silicon; Dielectric or Ceramic; Polymer
- Applications: Flat Panel Display (optional feature); MEMS (optional feature); Optical Coatings (optional feature); Semiconductors (optional feature); Cutting tool or other wear components (optional feature); Magnetic storage (optional feature); Customer Specific
- Process: Physical Vapor Deposition; Resistance Evaporation (optional feature); Electron Beam Evaporation (optional feature); DC_Sputter (optional feature); RF_Sputter (optional feature); Plasma Etching and Cleaning (optional feature); Multiple Processes (optional feature); Rapid Thermal Processing (optional feature); Vacuum Annealing; Vacuum Soldering
- Chamber Size: Large Chamber Per Customer Specs
Magest -- S200
from ULVAC Technologies, Inc.
from ULVAC Technologies, Inc.
Magest S200 is a PVD system for TMR multilayer films and magnetic shield. Multi-chamber configuration is equipped and supports applications ranging from R &D to mass-production. [See More]
- Materials Processed: Aluminum
- Applications: Research / Surface Analysis; Semiconductors
- Process: Physical Vapor Deposition
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
