High Vacuum Experimentation Systems -- UNIVEX 450C Cluster Systems
from Oerlikon Leybold Vacuum USA Inc.
from Oerlikon Leybold Vacuum USA Inc.
For special applications we can also supply cluster systems based on the UNIVEX concept. These clusters are equipped according to customers requirements and incorporate separate processing and load lock and transfer chambers. [See More]
- Materials Processed: Aluminum; Metal; Silicon; Dielectric or Ceramic; Polymer
- Applications: Flat Panel Display (optional feature); MEMS (optional feature); Optical Coatings (optional feature); Semiconductors (optional feature); Cutting tool or other wear components (optional feature); Magnetic storage (optional feature); Customer Specific
- Process: Physical Vapor Deposition; Resistance Evaporation (optional feature); Electron Beam Evaporation (optional feature); DC_Sputter (optional feature); RF_Sputter (optional feature); Plasma Etching and Cleaning (optional feature); Multiple Processes (optional feature); Rapid Thermal Processing (optional feature); Vacuum Annealing; Vacuum Soldering
- Chamber Size: Large Chamber Per Customer Specs
SME Series
from ULVAC Technologies, Inc.
from ULVAC Technologies, Inc.
The SME Series is a series of space-saving, low-cost cluster-type sputtering systems ideal for SAW devices and compound semiconductors. The series lets you create a highly cost-effective line tailored to your application. [See More]
- Materials Processed: Aluminum; Tungsten; Metal; Silicon; Dielectric or Ceramic; Oxides; Silicides; Nitrides; Germanium; Gallium Arsenide or Compound Semiconductors
- Applications: Research / Surface Analysis; Semiconductors
- Process: Physical Vapor Deposition; Sputtering
- Vacuum / Pressure Range: (UHV, < 10-8 torr)
