Oxidizer Type:Other Thermal Oxidizers and Catalytic Oxidizers Datasheets
from Advanced Energy Industries, Inc.
The Litmas ® RPS system is a foreline abatement solution that reduces the global warming footprint in semiconductor processing. This high-performance, linear-inductive plasma source fully integrates a 2 MHz power supply and matching circuitry. It accommodates wide impedance operating ranges... [See More]
- Oxidation Technology: Inductive Plasma
- Oxidizer Type: Thermal
- Applications: Abatement of Environmentally-Harmful PFC Gases
- Temperature Range: 41 to 104