Oxidizer Type:Other Thermal Oxidizers and Catalytic Oxidizers Datasheets

Litmas® RPS for Foreline PFC Abatement Linear Inductive Plasma Source
from Advanced Energy Industries, Inc.

The Litmas ® RPS system is a foreline abatement solution that reduces the global warming footprint in semiconductor processing. This high-performance, linear-inductive plasma source fully integrates a 2 MHz power supply and matching circuitry. It accommodates wide impedance operating ranges... [See More]

  • Oxidation Technology: Inductive Plasma
  • Oxidizer Type: Thermal
  • Applications: Abatement of Environmentally-Harmful PFC Gases
  • Temperature Range: 41 to 104