Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
  • Technology: Reflectometer
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: FilmThickness (optional feature); WaferThickness (optional feature)
CRTM Series -- CRTM-6000
from ULVAC Technologies, Inc.

High resolution, high speed sampling, long life span [See More]

  • Applications: Wafer; CVD / PVD; Flat panel display; Optical components or lenses
  • Technology: Quartz crystal microbalance
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Deposition rate; CMP, etching, process gas or plasma diagnostics; FilmThickness
Laser Scanning Confocal Microscope -- LSCM
from WDI Wise Device Inc.

The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]

  • Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
  • Technology: Optical / Imaging
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Defects, dimples or film residues; FilmThickness; Area mapping; Mask Alignment
EDXRF Analyzer -- EX-6600 SDD
from Xenemetrix Ltd.

EX-6600 SDD. Secondary Target EDXRF. Xenemetrix ’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates... [See More]

  • Applications: Wafer; CVD / PVD; Electroplate
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
  • Mounting / Loading: Manual loading; Floor
  • Measurements: Composition
Metrology System -- Z3D-7000 Series
from Zygo Corporation

Simultaneously measures multiple parameters [See More]

  • Applications: Wafer; CVD / PVD; Electroplate; Polishing / CMP; Photolithography; Etching; Bumping Processes
  • Technology: Profilometer or AFM; Optical / Imaging; Interferometer
  • Mounting / Loading: In-line; Floor
  • Measurements: Critical dimensions or Trench geometry; FilmThickness; Roughness / Waviness; Area mapping; DepthProfiling; 3D Surface Metrology