Technology:Other Thin Film Monitors Datasheets

from ULVAC Technologies, Inc.

The principle of the measurement method is shown below. A portion of a rectangular film specimen is heated by a modulated laser beam, which is a line heat source, made by scanning the laser spot rapidly with constant speed in the width direction of the specimen. Temperature waves, which propagate... [See More]

  • Technology: Modulated Laser Beam
  • Applications: CVD / PVD; Polymer or photoresist films
  • Mounting / Loading: Manual loading
  • Measurements: Thermal Diffusivity/Conductivity
EDXRF Analyzer -- EX-6600 SDD
from Xenemetrix Ltd.

EX-6600 SDD. Secondary Target EDXRF. Xenemetrix ’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates... [See More]

  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
  • Applications: Wafer; CVD / PVD; Electroplate
  • Mounting / Loading: Manual loading; Floor
  • Measurements: Composition